Einfluß von Getterprozessen auf die Eigenschaften von ionenimplantierten integrierten Fotodioden

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Einfluß von Getterprozessen auf die Eigenschaften von ionenimplantierten integrierten Fotodioden

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ISBN: 9783531031330

Language: German

Publication date: 01.01.1982

Number of pages: 42

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