Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications

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Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications
Within this thesis fabrication processes for high-quality Josephson junctions based on niobium and aluminum oxide as well as niobium nitride and aluminum nitride on various substrates are discussed. Techniques for achieving a planar chip topography and sub-µm lateral dimensions, aiding the realization of sophisticated Josephson devices such as SQUIDs, flux-flow oscillators and long Josephson junctions with artificial phase discontinuities, are presented in detail.

More from the series "Karlsruher Schriftenreihe zur Supraleitung / Hrsg. Prof. Dr.-Ing. M. Noe, Prof. Dr. rer. nat. M. Siegel"

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ISBN: 9783731501220

Language: English

Publication date: 24.12.2013

Number of pages: 201

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