Scanning Electron Microscopy

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Scanning Electron Microscopy
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

More from the series "Springer Series in Optical Sciences"

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80 % of the price goes directly to the author.

ISBN: 9783540639763

Language: English

Publication date: 17.09.1998

Number of pages: 529

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