Although angle and position measurement is one of the seemingly simpler disciplines in metrology, the known measurement procedures comprise mathematical and physical challenges. In the case of inductive sensors, this is usually due to the eddy currents used for measurement, which are difficult to calculate analytically. For this reason, cumbersome FE simulations are generally used to predict important parameters such as sensor accuracy. This book presents an approach to drastically reduce such simulations and behavior predictions that combines simplified simulation models with statistical methods. As a result, mathematical models are generated, which can even replace simulation completely. In addition, simple guidelines for the sensor design can be derived from the models obtained. The sensor accuracy is usually calculated as a deviation from a reference signal. It shows characteristic orders in the harmonic analysis. For this inductive principle, a fourth order is dominant within a signal period. With the method developed, this order could be minimized by improving the coil geometry.